process chamber 예문
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- The CIS anode may be viewed as a high conductance tube connected directly to the process chamber.
- The input gases enter the remote plasma source and are transported to the main process chamber to react.
- On the other hand, depositions and etches process entire wafers at once, without the need for wafer stage motion in the process chamber.
- In 1987, Applied introduced a CVD machine called the Precision 5000, which differed from existing machines by incorporating diverse processes into a single machine that had multiple process chambers.
- Monitoring the ambient with a thermocouple has only recently become feasible, in that the high temperature ramp rates prevent the wafer from coming to thermal equilibrium with the process chamber.